EDA software

Semiconductor Instruments

Modeling Service

All-In-One Semiconductor Parameter Analyzer – FS-Pro

Introduction

FS-Pro Series is the first All-In-One Semiconductor Parameter Analyzer integrates high precision IV, CV, and 1/f noise test in one single box. FS-Pro is driven by Machine Learning algorithm, which greatly enhances the measurement efficiency while maintaining the accuracy. Recent seamless integration of FS-Pro to 9812DX system makes both systems more powerful and faster. FS-Pro has a wide range of applications on semiconductor devices, circuits, LED materials, two-dimensional devices, nano materials and devices, with support up to 100 channels, each with full functions for IV, CV and 1/f noise tests.
FS-Pro has been adopted not only by leading design companies, foundries and IDMs, but also many world-famous universities and academic users.

Key Benefits

All-In-One: Industry's first high precision IV, CV, and 1/f noise test all in one box, provides complete low-frequency parametric characterizations without needs for changing cables or connections.
Fast Speed:10X speed up over traditional test instruments. The industry's first AI-driven test algorithm enables powerful speed boost while keeping test accuracy.
Modular Architect:Modular architect enables flexible test configurations. And it can be extended to Wafer Acceptance Tests (WAT).
Easy Set-up:Built-in test control and analysis software LabExpress™ provides hundreds of pre-defined test routines and friendly GUI together with the support to auto-probers and third-party instruments.
Wide Range and High Precision:Up to 200V, 1A (3A pulsed), and 0.1fA sensitivity, noise floor 2e-28A2 /Hz, lowest Freq to 0.001Hz
As 9812DX’s internal SMU module:Seamlessly integrated with 9812 system and NPP software, provides significant speedup for 9812DX system.
Device Modeling and Simulation Available:Optional built-in modeling and simulation software (BSIMProPlus™/MeQLab™/NanoSPICE™).

Applications

Applicable to semiconductor devices, circuits, LED materials, two-dimensional devices, nano materials and devices, with support up to 100 channels.
IV measurement.
CV measurement.
1/f noise measurement.
Built-in Pulse Measurement.

Specifications

IV Measurement
High Precision Parametric Measurement: 200V max, 0.1fA sensitivity, 30fA accuracy, 1A max current, Pulsed current up to 3A.
CV Measurement
Built-in CV (no external LCR required) frequency range: 10Hz to 10kHz; capacitance accuracy: 20fF; maximum DC bias voltage: 200V. FS-Pro also offers external LCR, including high-precision (10fF@2MHz, built-in DC bias 40V) and high bandwidth (8MHz) options, also supports industry mainstream LCR meters such as E4980.
1/f noise Measurement
Ultralow frequency, high-sensitive and high speed RTS/ 1/f noise measurement with wafer mapping; capable for mass production test. Key specifications are:
Bandwidth: 0.001Hz – 100KHz
Resolution: 2e-28A2/Hz
Measurement speed: <10sec/bias (f>0.5Hz)
DUT min impedance: 500Ω
DUT max DC bias: 200V, 1A
Built-in Pulse Measurement
Voltage range: ± 200V, minimum pulse width:50us, minimum resolution: 100nV.

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